Performance evaluation of micromachined mirror arrays for adaptive optics

摘要

The performance of different MEMS mirrors fropm Boston University; MEMS Optical LLC, University of Colorado and OKO Technologies was studied in respect to an application in a model-free adaptive optics system. The frequency response characteristic was determined in a simple laser beam focusing set-up. Closed-loop adaptiation experiments were prerformed using A VLSI controller system implementing a stochastic parallel gradient descent optimization algorithm. The system behavior using different MEMS mirror types, esp. adaptiation speed, was compared.