Abstract: A micromachined deformable mirror ($mu@-DMs) for optical wavefront correction is described. Design and manufacturing approaches for $mu@-DMs are detailed. The $mu@-DM employs a flexible silicon membrane supported by mechanical attachments to an array of electrostatic parallel plate actuators. Devices are fabricated through surface micromachining using polycrystalline silicon thin films. $mu@-DM membranes measuring 2 mm $MUL 2 mm $MUL 2 $mu@m, supported by 100 actuators are described. Figures of merit include stroke of 2 $mu@m, resolution of 10 nm, and frequency bandwidth DC - 7 kHz. The devices are compact, inexpensive to fabricate, exhibit no hysteresis, and use only a small fraction of the power required for conventional DMs. Performance of an adaptive optics system using a $mu@- DM was characterized in a closed-loop control experiment. Significant reduction in quasi-static wavefront phase error was achieved. Advantages and limitations of $mu@-DMs are described, in relation to conventional adaptive optics systems and to emerging applications of adaptive optics, such as high resolution correction, small aperture systems, and optical communication.!9
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机译:摘要:描述了一种用于光波前校正的微机械可变形反射镜($ mu @ -DMs)。详细介绍了$ mu @ -DM的设计和制造方法。 $ mu @ -DM采用了柔性的硅膜,该膜由机械附件支撑到一系列静电平行板致动器上。通过使用多晶硅薄膜的表面微加工来制造器件。描述了由100个致动器支撑的尺寸为2mm的Mu-DM膜2mm的MUL 2mm的MUL 2m。品质因数包括2μm的行程,10 nm的分辨率和DC-7 kHz的频率带宽。该器件结构紧凑,制造成本低,没有滞后现象,并且仅使用传统DM所需功率的一小部分。在闭环控制实验中表征了使用μμ-DM的自适应光学系统的性能。准静态波前相位误差显着降低。结合传统的自适应光学系统和自适应光学的新兴应用(如高分辨率校正,小孔径系统和光通信),介绍了$ mu @ -DM的优点和局限性!9
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