Experimental and numerical study of conjugate heat transfer in a horizontal channel heated from below: applications to CVD processing

摘要

A detailed experimental and numerical study is carried out to investigate conjugate heat transfer in a horizontal channel with a heated section which simulates Chemical Vapor Deposition (CVD) processign. Since film quality, uniformity and deposition rate have strong dependence on temperature, the role of conjugate heat transfer in influencing temperature distribution is significant in thin film production.