Computer simulation of diffusion processes in microelectronics: approach to the solution of statistical problems

摘要

Abstract: Many-dimensional technology simulation inmicroelectronics is the extremely actual problem. Hereit is important to know how random fluctuations of thetechnological parameters affect on the impurityconcentration profiles. We used the pattern recognitionmethod as one of the effective tool for the solution ofthis problem. Expert analysis system as an effectivetool for numerical calculation database processing isdiscussed. !12