Computer simulation of diffusion processes in microelectronics: approachto the solution of statistical problems,

摘要

Abstract: Many-dimensional technology simulation in microelectronics is the extremely actual problem. Here it is important to know how random fluctuations of the technological parameters affect on the impurity concentration profiles. We used the pattern recognition method as one of the effective tool for the solution of this problem. Expert analysis system as an effective tool for numerical calculation database processing is discussed. !12