An assessment of silicon-based microfabrication and micromachining techniques for chemical and electrochemical sensor development

摘要

Silicon-based microfabrication and micromachining techniques have been used for the manufacture of chemical and electrochemical sensors for some time. However, practical sensors produced by these processes remain limited. Issues related to potential application of these processes are identified. Future development of chemical and electrochemical sensors using these techniques will be discussed.