High temperature measuring system for MIS sensor investigation in aggressive gas atmosphere

机译：用于腐蚀性气体环境中MIS传感器调查的高温测量系统

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A measuring system including high te,perature gas cell and gas equipment for the measurement of gas sensitivity o f SiC based MIS gas sensors at t te,peratures up to 400 deg C is developed. The performance of this system in the measurement of sensor properties in fluorine, hydrogen fluoride and fluorohydrocarbons is discussed.

机译：开发了一种包括高温气室和气体设备的测量系统，用于测量温度高达400摄氏度时基于SiC的MIS气体传感器的气体敏感性。讨论了该系统在氟，氟化氢和氟代烃中传感器性能的测量中的性能。

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《European conference on solid-state transducers;UK conference on sensors and their applications》|1998年|p.953-956|共4页
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a.A.Vasiliev; W.Moritz; V.V.Filippov; A.A.Terentjev; L.Bartholomaus; U.Roth;
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中图分类电工技术;
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High temperature measuring system for MIS sensor investigation in aggressive gas atmosphere

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