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MAXIMUM AT ALS: A Powerful Tool to Investigate Open Problems in Micro- and Optoelectronics

机译:ALS的最高标准:一个强大的工具,用于研究微电子和光电技术中的未解决问题

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We rpesent recnet results obtained by MAXIMUM at the Advanced Light Source (ALS), at the Lawrence Berkeley National Laboratory. MAXIMUM is a scanning photoemission microscope, based on a multilayer coated Schwarzschild objective. An electron energy analyzer collects the emitted photoelectrons to form an image as the sample itself is scanned. The microscope has been purposely designed to take advantage of the high brightness of the third generation synchrotron radiation sources, and it installation at ALS has been recently completed. The spatial resolution of 100 nm and the spectral resolution of 200 meV make our instrument an extremely interesting tool to investigate current problems in opto- and microelectronics. In order to illustrate the potential of MAXIMUM in these fields, we report new results obtaiend by studying hte electromigration in Al-Cu lines and the Al segregation in AlGaN thin films.
机译:我们建议在劳伦斯伯克利国家实验室的高级光源(ALS)中获得MAXIMUM获得的直肠结果。 MAXIMUM是基于多层镀膜Schwarzschild物镜的扫描光发射显微镜。电子能量分析仪收集所发射的光电子,以在扫描样品本身时形成图像。显微镜经过专门设计,可以利用第三代同步加速器辐射源的高亮度,并且最近已经完成了在ALS上的安装。 100 nm的空间分辨率和200 meV的光谱分辨率使我们的仪器成为研究光电子学和微电子学中当前问题的极为有趣的工具。为了说明MAXIMUM在这些领域的潜力,我们报告了通过研究Al-Cu线中的电迁移和AlGaN薄膜中的Al偏析获得的新结果。

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