Micryosystems for Diverse Applications using Recently Developed Microfabrication Techniques

摘要

The continuous progres in micro and nano-system technologies has allowed the successful development of many innovative products in process control, evironmental monitrong, healthcare, automotive and aerospace as well as information processing systems. In this paper on overiview will be given of current progress in micro-and nanofabrication procwss technologies, such as deep reactive ion etching, micro-electro discharge machining, thick photoestist procesisng and plating. The availability of thes eicro-and nanofabrication processes will be llustrated with be illustrated with examples of new generations of silicon-based senswors, actuators and Microsystems with a particular emphasis on real applications of these components. and systems.