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Vacuum systems laboratory development

机译:真空系统实验室开发

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摘要

The implementation of new associate degree programs in semiconductor manufacturing at community colleges across the country has created a critical need for vacuum technology courses and supporting laboratories. Unfortunately few resources have been available to support technology-level courses in vacuum systems. This paper describes the results of a two-year project to develop a vacuum technology course, implement a vacuum systems laboratory, and provide faculty enhancement activities.
机译:全国各地社区大学在半导体制造领域实施新的副学士学位课程,对真空技术课程和支持实验室产生了迫切的需求。不幸的是,几乎没有资源可用于支持真空系统的技术水平课程。本文描述了一个为期两年的项目的结果,该项目旨在开发真空技术课程,实施真空系统实验室并提供教职员工增强活动。

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