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X-ray silicon detectors for measuring hard x-ray radiation damage effects

机译:用于测量硬X射线辐射损坏效果的X射线硅探测器

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Abstract: For high sensitivity hard x-ray detector applications there is a solid-state alternative using high purity silicon as starting material. The paper presents some original results concerning a radiation hardened technology to be used for obtaining x-ray silicon detectors and the behavior of the special designed devices in a specific radiation environment. Original processing sequences were experimentally tested and results concerning the most performant technology suited for this specific application are presented. Specially designed gettering steps were applied by backside ion implantation and annealing for enhancing the minority carriers lifetime in the substrate material and for reducing leakage currents at orders less than 10 nA. After a complete presentation of the specific characteristics of the as obtained detectors, they were exposed and completely characterized in x-ray ambient up to dose levels of 10$+8$/ rad (E greater than 50 keV). Solutions for increasing the detector sensitivity and stability in radiation environments are proposed. !3
机译:摘要:对于高灵敏度硬X射线检测器应用,有一种使用高纯度硅作为起始原料的固态替代品。本文介绍了一些有关辐射硬化技术的原始结果,这些技术将用于获得X射线硅探测器以及特殊设计的设备在特定辐射环境中的行为。对原始处理序列进行了实验测试,并给出了适用于此特定应用的最高性能技术的结果。通过背面离子注入和退火应用了特殊设计的吸气步骤,以提高衬底材料中少数载流子的寿命,并以小于10 nA的数量级减少泄漏电流。完整介绍所获得的探测器的特定特性后,将其曝光并在X射线环境中完全表征,剂量水平最高为10 $ + 8 $ / rad(E大于50 keV)。提出了用于提高探测器在辐射环境中的灵敏度和稳定性的解决方案。 !3

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