Amorphous silicon-carbon alloys and amorphous carbon from direct methane and ethylene activation by ECR

摘要

Hydrogenated amorphous silicon-carbon alloys are prepared using electron-cyclotron resonance (ECR) plasma-enhanced chemical vapor deposition.Hydrogen is introduced into the source resonance cavity as an excitation gas.Silane is introduced in the main chamber in the vicinity of the plasma stream,whereas the carbon source gases,emthane or ethylene,are introduced either with the silane or with the hydrogen as excitation gases.The effect of the type of carbon-source gas,excitation gas mixture and silane0to-carbon source gas flow ratio on the deposition rate, bandgap,subgap density of states,spin density and hydrogen evolution are studied.