Optical properties of large area diffractive Fresnel-lenses with modified zone-geometry

摘要

Abstract: A special surface geometry of diffractive Fresnel-lenses, which is well adapted to the Cartesian working regime of most microlithographic machines is presented in this paper. Due to this adaptation the amount of data necessary for the description of the exposure and also the exposure-time decreases drastically and so the realization of large area diffractive lenses and lens-arrays became possible. In this paper we compare the modified lens-geometry with the common radially symmetrical diffractive Fresnel-lens and we show some experimental results which we obtained for a lens realized by electron-beam lithography. !6