UV-light-imprinted sol-gel silica glass waveguide 1x8 beam splitter on silicon

摘要

Abstract: We describe fabrication and characterization of UV-light imprinted sol-gel silica glass waveguide 1 $MUL 8 beam splitter on silicon. Waveguide fabrication parameters carried out for channel waveguide realization were adapted at this new design. The splitter exhibited a relatively uniform output and a configuration loss of 0.83 dB at 1.55 $mu@m wavelength.!7