Lateral and vertical dimension measurements by using laser scanning microscopy including an optical heterodyne function

摘要

A construction of surface profile measurement system for measuring lateral and vertical dimensions of submicron to micron size and its applications to industrial inspection are described. This system includes a laser scanning microscopy (LSM) and an optical heterodyne interferometry (OHI) functions in one and the same optical device. These two functions are used individually depending on the purpose of the measurement. OHI measures vertical dimensions, LSM measures lateral dimensions. The selection of the functions is performed by changing the intensity distribution of the probe light beam falled on a sample and signal processing system of the reflected light beam.