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Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect

机译:使用莫尔效应分析菲索相步进法中的测量范围

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Abstract: In this work, the phase evaluation of multiple-beamFizeau interferograms is carried out by the usualphase-stepping algorithms by superimposing theinterferogram on a Ronchi grid located at theinterferometer image plane. The phase modulation,required for phase measurement, is obtained bytranslating the grid in its own plane, while a slightdefocusing in the image acquisition system provides asuitable sinusoidal intensity pattern. An estimation ofthe measurable range of surface slopes is calculatedand experiments on a spherical surface have beenrealized in order to analyze the validity of theobtained results.!8
机译:摘要:在这项工作中,通过将常规干涉仪的相位图叠加在干涉仪像面上的Ronchi栅格上,通过常规的相位步进算法对多束菲索干涉图进行相位评估。相位测量所需的相位调制是通过在其自己的平面上平移栅格而获得的,而图像采集系统中的轻微散焦则提供了合适的正弦强度图案。计算了表面坡度可测量范围的估计值,并在球形表面上进行了实验,以分析所获得结果的有效性。!8

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