Absorption of ArF- KrF- and Xef-laser radiation in optical materials at the moment of E-beam influence

摘要

Abstract: The results of measurements of the optical density, induced at the moment of influence of the e-beam on crystal MgF$-2$/, CaF$-2$/, BaF$-2$/, Al$-2$/O$-3$/, and also on different silica glasses, performed using laser radiation at 193, 248, and 353 nm, are presented and discussed. !18