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Thermal rearrangement of novolak resins used in microlithography

机译:微光刻中使用的线型酚醛清漆树脂的热重排

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Abstract: Changes in phenolic-formaldehyde resin properties are described in terms of thermal exposure. At high temperature, resin molecular weight, dissolution properties and chemical composition change depending on the presence or absence of monomers. Without monomer in the resin melt at 220$DGR@C, resin molecular weight increases with a corresponding decrease in dissolution rate. In the presence of monomer, molecular weight generally decreases. Dissolution rate may fluctuate depending on the monomer mixture. Three,five- Xylenol and 2,3,5-trimethylphenol co-monomers induced the most extreme changes in resin properties with thermal treatment. Resin degradation-recombination processes suggest a classical Friedel-Craft rearrangement mechanism. !10
机译:摘要:酚醛树脂的性能变化是通过热暴露来描述的。在高温下,树脂分子量,溶解性能和化学组成根据单体的存在或不存在而变化。在220°DGR @ C的温度下,如果没有单体在树脂中熔融,则树脂分子量增加,而溶解速率相应降低。在单体存在下,分子量通常降低。溶解速度可能会根据单体混合物而波动。通过热处理,三,五-二甲苯酚和2,3,5-三甲基苯酚共聚单体引起了树脂性能的最极端变化。树脂降解-重组过程表明了经典的Friedel-Craft重排机制。 !10

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