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Reverse proton exchange in LiTaO3 and LiNbO3 for buried optical waveguides

机译:LiTaO3和LiNbO3中用于掩埋光波导的反向质子交换

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Abstract: We describe the fabrication and properties of optical waveguides formed in Z-cut proton exchanged LiTaO$-3$/ and X- and Z-cuts annealed proton exchanged LiNbO$-3$/ structures by reverse proton exchange Li$+$PLU$/ $YLD H$+$PLU$/ in the LiNO$-3$/ and LiNO$- 3$/-KNO$-3$/-NaNO$-3$/ melts at 280 - 340$DGR@C. Surface waveguides, supporting ordinary polarization modes, as well as the buried waveguides for extraordinary polarization modes have been produced. The diffusion constant D$-o$/ and the activation energy Q for the reverse proton exchange process in LiTaO$-3$/ were calculated to be 2.95 $DOT 10$+7$/ $mu@m$+2$//h and 97.66 kJ/mol, respectively. A surface decrease of the ordinary refractive index $Delta@n$-o$/$EQ $MIN@0.034 in H:LiTaO$-3$/ waveguides with $Delta@n$- e$/$EQ 0.026 was estimated from direct measurements. The reverse proton exchange method was used to form buried waveguides in the well annealed proton exchanged lithium niobate waveguides. The different crystal phases were identified in APE LiNbO$-3$/. The relationships between extraordinary and ordinary index changes in APE LiNbO$-3$/ waveguides annealed at different temperatures (330$DGR@C and 400$DGR@C) were obtained.!26
机译:摘要:我们描述了通过反质子交换Li $ + $ PLU在Z切质子交换LiTaO $ -3 $ /和X和Z切退火质子交换LiNbO $ -3 $ /结构中形成的光波导的制造和性能。 LiNO $ -3 $ /和LiNO $ -3 $ /-KNO $ -3 $ /-NaNO $ -3 $ /中的$ / $ YLD H $ + $ PLU $ /在280-340 $ DGR @ C时熔化。已经生产出支持普通偏振模的表面波导以及用于特殊偏振模的埋入式波导。计算出LiTaO $ -3 $ /中反质子交换过程的扩散常数D $ -o $ /和活化能Q为2.95 $ DOT 10 $ + 7 $ / $ mu @ m $ + 2 $ // h和97.66 kJ / mol。根据直接估算,在H:LiTaO $ -3 $ /波导中的普通折射率$ Delta @ n $ -o $ / EQ $MIN@0.034的表面减小量为$ 26 @ $ n-e $ / EQ 0.026。测量。反向质子交换方法用于在退火良好的质子交换铌酸锂波导中形成掩埋波导。在APE LiNbO 3-/中鉴定出不同的晶体相。获得了在不同温度(330 $ DGR @ C和400 $ DGR @ C)下退火的APE LiNbO $ -3 $ /波导的非凡和寻常折射率变化之间的关系。26

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