Laser-induced etching and deposition of tungsten in tungstenhexafluoride-hydrogen atmosphere

摘要

Abstract: Combined thermally induced etching and deposition of W in a mixture of WF$-6$/ and H$-2$/ is investigated by local laser-induced patterning of thin tungsten layers on quartz. The process divides into areas of pure etching and deposition, depending on the partial pressures of the gases. !18