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首页> 外文会议>ALT '94 International Conference: Laser Methods of Surface Treatment and Modification >Processing parameters influence on structural properties of PZT layers deposited by pulsed laser deposition (PLD)
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Processing parameters influence on structural properties of PZT layers deposited by pulsed laser deposition (PLD)

机译：工艺参数对通过脉冲激光沉积（PLD）沉积的PZT层的结构性能产生影响

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Abstract: Ferroelectric thin film of Pb(Zr$-0.48$/Ti$-0.52$/)O$-3$/ (PZT) was deposited on lattice mismatched (0001)sapphire for substrate temperatures T$-g$/ in the region from 470 to 590$DGR@C and oxygen pressure of 200 and 900 mTorr. Structural properties were characterized by XRD. Improvement of XRD patterns of deposited films with post-annealing temperature of the furnace was studied. The development of the plasma plume shape from PZT target under changing deposition conditions was investigated by CCD camera. Results show strong dependence of plume shape with oxygen pressure and laser beam spot size. !6
机译：摘要：铁电薄膜PB（ZR $ -0.48 $ / ti $-$-$-$-$-$/40 $ /）o $ -3 $ /（pzt）在格子不匹配（0001）蓝宝石中涂上底物温度t $ -g $ /区域从470到590 $ @ C和200和900 MTORR的氧气压力。结构性质的特征是XRD。研究了炉退火温度的沉积薄膜XRD图案的改进。通过CCD相机研究了在改变沉积条件下的PZT靶标的等离子体羽流的发展。结果显示羽毛形状与氧气压力和激光束点尺寸的强烈依赖。 ！6

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