Need for industry standards for the design of electrical systems for cleanrooms

摘要

It is pointed out that there is a need to develop industry standards for the proper design of cleanroom facilities due to the continued advancement to permit critical research, development, and manufacturing of advanced technology, including microelectronics. A standards committee should be established for advanced technology and manufacturing facilities with a primary focus on the development of cleanroom electrical standards. The authors focus on microelectronics cleanrooms; they discuss the reasons why certain topics must be covered by such standards and present proposals for the content. Proposed electrical system design guidelines are considered with respect to the following: power distribution; engineering, standby, and uninterruptible power; power supply quality; electromagnetic interference; hazardous locations; and lighting.