A beam shaping technique, which is capabl e ofconverting a Gaussian beam to an arbitrary 3D beamprofil e through the impl ement ation of a phase-onlySpatial Light Modul ator (SLM) combined withpolarising optics, is present ed. A beam profilingcamera provides visualisation of beam alterations,which allowed for control over beam shape andintensity distribution in real time. Various beamprofil es can be created for di fferent applications. Aninvestigation into the production of l aser inducedperiodic surface struct ures (LIPSS) with a square fl attopbeam shows pot ential improvement of LIPSSuni formity over a Gaussian beam. It is believed thatthe combi nation of accurat e beam shape and top-hatintensity allows uni form LIPSS production in a regionof ～0.4mm along optical axis, which is well over theRayleigh length. Benefits and limitations and of thistechnique are also discussed.
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