Fiber-Coupled High Power Stabilized Green Laser for Material Processing Applications

摘要

A new high power laser optical system has beendeveloped which is operated by pulsed, green, diodepumped solid state lasers. The design is based onmultiplexing of lasers by fiber coupling and is scalableto power levels above 1.6kW. The combined highpulse energy reaches up to 200mJ and is arranged in aline beam by homogenizer based laser optics. Energydensity up to 1,000mJ/cm~2 is obtained in a 100 -750mm long line. This line beam configuration can,for example, be optimized for both a-Si thin filmannealing/crystallization and laser lift off (LLO)applications. Recent results are reported.