Ultra-Low Vibration Linear Stirling Cryogenic Refrigerator for Sub-Nano Resolution Microscopy

摘要

Wide use of so called "dry-cooling" technology, eventually replacing the LN2 cooling approach in high-resolutioninstrumentation, such as Scanning Electronic Microscopes, Helium Ion Microscopes, Superconductive QuantumInterference Devices, etc., motivates further quieting of appropriate cryogenic refrigerators. Linear Stirling cryogenic refrigerators are known to be a major source of harmful vibration export compromising theoverall performance of vibration-sensitive equipment. The dual-piston approach to a design of a linear compressor yieldsinherently low vibration export and, therefore, is widely accepted across the industry. However, the residual vibrationdisturbance originated even from the technological tolerances, natural wear and contamination cannot be completelyeliminated. Moreover, a vibration disturbance produced by a pneumatically driven cold head is much more powerful ascompared to this of a compressor. The authors successfully redesigned the existing Ricor model K535 Stirling cryogenic refrigerator for use in vibration-sensitive electronic microscopy, where the image resolution is specified in angstroms. The objective was achieved by passive mechanical counterbalancing of the expander portion of the refrigerator, in acombination with an active two-axis control of residual vibrations, relying on National Instruments CompactRlOhardware, incorporating a real-time processor and reconfigurable FPGA for reliable stand-alone embedded application,developed using LabVIEW graphical programming tools. The attainable performance of the Ultra-Low Vibration linear Stirling cryogenic refrigerator RICOR model K535-ULVwas evaluated through the full-scale experimentation.