A Systematic Study on BEOL Defectivity Control for Future AI Application

摘要

In this paper, a case study on control of BEOL defectivity in a systematic way for the future AI application is presented. A few novel methodologies were introduced to identify the source of defectivity in various BEOL sectors, such as, patterning, barrier deposition, plating, and CMP. We successfully reduced the defectivity to the level required to yield target AI devices.