MIL-STD-1246D / IEST-STD-CC1246E for Non-Volatile Residue and Thermal Desorption GC-MS for Cleanroom Monitoring

摘要

1. MIL-STD-1246D is a useful reference guideline for manufacturers 2. This is succeeded by IEST-STD-CC1246E 3. ASTM E1235-12 and IDEMA M7-98 are established test methods to determine the NVR cleanliness level in MIL-STD-1246D and IEST-STD-CC1246E 4. NVR and FTIR analyses can be a good Key Process Indicator (KPI), despite a NVR detection of ug/cm~2, to enable process improvements and controls at each stage of manufacture 5. TD GC-MS can identify the organic surface molecular compounds with improved sensitivity of ng/cm~2 6. Provides quantitative results and identifies individual organic compounds that can determine probable sources 7. A process contamination audit is required to reveal the source and mechanism of contamination introduction 8. One can then implement a contamination control program to meet current and future product cleanliness specifications that may be more stringent