In this paper we provide a topological analysis to quantify and compare the effects of cross-axis couplings on multi-axis positioning with single-moving-part motion stages. This analysis is expected to help designers select the right design configuration for their specific multi-DOF motion-control applications. In addition, we introduce the CCQ as a standard measure to compare the levels of cross-axis couplings in multi-axis motion control. The CCQ is an augmentation of the conventional parasitic error, and aimed at comparing the cross-axis perturbations in transient responses of multi-DOF motion stages.
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