Phase Method for Measuring the output Signal of a Single-Mass MEMS Gyroscope as a Possibility of Improving its Performance

摘要

A method is proposed for determining the angular rate in a micromechanical gyroscope based on separation of the signal phase rather than extraction of the envelope of secondary oscillations of the inertial mass. The theoretical and experimental tests have shown the possibility of using this method to measure the angular rate in principle. The proposed phase method has some advantages over the commonly used amplitude method.