A Graphene Oxide-Based Humidity Sensor for Wearable Electronic

摘要

Layers of graphene oxide (GO) deposited on various substrates have been investigated for their capacitive and resistive features. It has been shown that such layers demonstrate large specific capacitances. Here we report the fabrication of a first GO-on-textile capacitive humidity sensor. GO layers are deposited on aluminum silicate textile, and the impedances of the deposits are measured at different atmospheric conditions using various voltage sweeping frequencies. The results demonstrate the dependence of the layer impedance on the humidity level in the surrounding atmosphere. Further, it is clarified that the layer capacitance is humidity dependent. A capacitive humidity sensor is designed and fabricated. The capacitance of a typical device varies from 130 pF, measured in dry synthetic air, to 5000 pF measured in air with 95% relative humidity (RH). Interestingly, these high sensitivities are measured at low frequencies (f=0.01 Hz); sensitivity to humidity decreases as the voltage sweeping frequency increase. For the first time, it is shown that the sensitivity of these capacitive humidity sensors considerably increase when very low frequencies are used for capacitance measurement. The ratio of the capacitance at RH= 95% to the capacitance at RH <; 0.1% both measured at 0.01 Hz is 32 times larger than the same calculated at 100 Hz. The device is suitable for wearable electronic applications.