BRIGHT COMBINATION OF COMPOSITIONAL AND TOPOGRAPHICAL INFORMATION IN A SINGLE IMAGE

摘要

Scanning electron microscope imaging uses several different processes arising from the interaction of the electron beam with the sample. These include production of backscattered and secondary electrons, X-ray emission, cathodoluminescence and others. Each of them reflects sample properties in a different way and thus provides specific information about the sample. The production of backscattered electrons (BSE) depends on the sample composition as well as on sample topography. Therefore, the detection of backscattered electrons is especially advantageous - it carries compositional and topographical information at the same time. To discriminate between these two types of information, it is necessary to record BSEs from various angles, but at the same time to retain information about the number of BSEs emitted. Multi-segment BSE detectors were developed to enable this purpose.