Field Emission from n-Type Si Surface Sandblasted by Al2O3 Fine Particles

摘要

An efficient silicon field emitter was fabricated by a simple sandblasting technique using Al₂O₃ fine particles. The fabricated rough structure worked well as an efficient field emitter. As the average emission current increased, the fluctuation ratio of the emission current decreased. The Si field emitters exhibited excellent emission-current stability in both long-term drift and short-term fluctuation.