Fully automated in-line optical test system: Advanced materials photonics

摘要

The development of a high throughput, accurate, and cost efficient inline optical test system is a key challenge to mass manufacturing of silicon photonics. For our Silicon Photonic technologies, we developed a fully automated wafer level optical test system for both, active and passive optical testing. The measured insertion loss of fiber grating couplers is repeatable within 1.1dB (3σ). A unique forward and reverse alternative test method is designed to extract photodetector responsivity.