Mechanical Behavior of a Capacitive Tunable Ultrasound Transducer for Bio Diagnostic Application

摘要

The content of this paper consists of two major parts. The first part includes a short review of development and different applications of a capacitive micro machined ultrasound transducer in medical imaging science. Also the performance of (CMUTs) and piezoelectric transducer elements have been compered and results which obtained by other researchers clearly show that a capacitive micro machined ultrasound transducer has a great potential for using in medical imaging application. In the second part of this paper, a distributed model was used to investigate the static deflection and dynamic behavior of a micro structure subjected to the electrostatic field of an electrostatic actuator. In addition, the frequency response of the microplate has been determined by the changing the bias DC voltage value which can be an acceptable way in order to create the tunable frequency structure for ultrasonic imaging in medical field.