A graphene platform on silicon for the Internet of Everything

摘要

We have pioneered a platform technology able to harness the properties of graphene directly from silicon carbide on silicon substrates for integrated on-chip or in-package applications, ranging from sensing and nanophotonics to integrated energy storage. The graphene synthesis is transfer-free and site-selective, leading to straightforward wafer-level fabrication and yielding sufficient adhesion for subsequent processing. This approach among others can pave the way towards miniaturized energy sources in SiP systems for smart nodes of the Internet of Everything.