Direct Measurement of Surface Temperature upto 1500K of Turbine Blade by MEMS Embeded Thin Film Sensors

摘要

Intelligent aero-engine is one of the three key projects in VAATE program. Embedded advanced sensors onto the key components such as turbine blade are highly necessary for those internet+ applications on intelligent aero-engine endeavors. In this paper, the Pt thin film sensor was fabricated onto the turbine blade surface using MEMS technology. This micro-machined embedded sensor on turbine blade is capable of measuring the high temperature up to 1300°C Very good linearity of the Pt thermal resistance vs. temperature in the sensor was observed and repeatability is good. This proves a successful ceramic coating to achieve a high temperature electrical insulation as well as a MEMS-sensor technology capable of fabricating the embedded thin film sensors directly onto the curved turbine blade surface. This high temperature sensor is small in size with a thickness within one urn and line width within a few hundred urn. This development is very useful to quantify the temperature of the sensitive spot on the turbine blade in the combustion environment for aero engine R&D purpose.