Complementary merits of yield-oriented and reliability-specific monitors for high-quality wafer-manufacturing

摘要

The yield-oriented monitor and reliability-specific monitor can provide complementary merits for high-quality wafer-manufacturing. In this paper, two case studies were provided respectively, and our insightful data reviews promptly identified, without any DOEs (Design of Experiments) along the production lines, the source of defects and failure mechanism involved. An interactive utilization of both monitors can make essential contributions to the cross-organizational endeavors towards high-yield manufacturing as well as “0 PPM” quality in product reliability.