Impact of amplifier errors on position loop accuracy of high-precision moving stages

摘要

To maximise essential system performance parameters, this research combines electrical, mechanical and position control models of a high-precision mechatronic system. The degradation of system performance induced by identified amplifier errors is analysed to reveal the significance of each error mechanism. The simplified outline of a mechatronic system is given to which models of the power amplifier are added in order to emulate the error mechanisms. Analysis of the impact of each error mechanism on the position accuracy of the mechatronic system is given from which specifications for the power amplifier can be obtained for a certain required position accuracy. Ensuing properly targeted requirements provide focused amplifier optimisation.