A wrist-worn rotational energy harvester utilizing magnetically plucked {001} oriented bimorph PZT thin-film beams

摘要

A wrist-worn eccentric rotor-based energy harvester utilizing multiple magnetically plucked flower petal-shaped bimorph lead zirconate titanate (PZT) thin-film beams was designed and fabricated. The bimorph beams were formed by depositing {001} oriented PZT films up to 5.4 μm in thickness on both sides of a 50 μm thick nickel foil. The prototype was characterized with an analytical system-level model and a bench-top swing-arm test set-up. The prototype can achieve approximately 40 μW power output from a bench-top pseudo walking motion input. Further simulation suggests that improvement can be made by growing thicker PZT layers.