Mechanical strength of 2.5D parylene C micropore-arrayed filtration membrane

摘要

This work experimentally studied the mechanical strength of the previously reported Parylene C based micropore-array membrane with a high porosity. The results indicated that the membrane, though with a high porosity, is strong enough and has a negligible pore size variation (<30 nm) during an up-to 150 mL/min filtration. The equivalent Young's modulus of the 2.5D filtration membrane were extracted preliminarily based on the experimental measurement, compared with theoretical prediction.