Study on AZO coated flexible glass as TCO substrate

摘要

This work presents detailed characterization of structural, optical and electrical properties of Al doped ZnO (AZO) coated Corning® Willow® Glass substrate as a function of AZO thickness. It has been observed that the carrier concentration increases and the sheet resistance decreases as the thickness of the coating increases. A sheet resistance as low as ~7 Ω/sq has been achieved for a 500 nm AZO coated flexible glass substrate with average 90% transparency in the visible region. The figure of merit (FOM) value as high as 7.4×10-2 Ω-1 has been calculated. The electrical as well as optical results are quite excellent and even better or comparable to those of commercial ITO and FTO substrates. The performance of the flexible substrate as transparent electrode for an a-Si:H solar cell has been demonstrated.