Micro-Nano TLC Overview of Research in Precision Micro- and Nanotechnology

摘要

This paper lays out a definition of and boundaries for the field of precision micro-nano (MN) engineering. Micro-nano research cuts across nearly all of the conventional macro-scale areas of precision engineering focus, so a clear definition is critical to understand the field. We provide oversight of the major sub-fields in MN precision engineering work, with particular note of the major driving efforts in each of these areas. This overview is intended to both introduce non-experts to the field as well as help stimulate cross disciplinary information transfer.