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DYNAMIC CHARACTERIZATION OF VERTICALLY ALIGNED CARBON NANOTUBE PADS FOR MATERIALS HANDLING APPLICATIONS

机译:垂直对齐的碳纳米管垫板在材料处理应用中的动态特性

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Vertically-aligned carbon nanotube (VACNT) pads have recently received widespread attention for use as contact surfaces in material handling processes that involve the transfer of bare silicon wafers. Such processes will benefit from the strong friction force interactions and minimal adhesion force offered by these pads, allowing the wafer to be picked up, carried, and quickly placed, without encountering problems which may arise due to excessive adhesive forces. Despite these benefits, practical implementation has been hindered because VACNTs have nonlinear mechanical characteristics which are still not well understood. Consequently, significant attention has been devoted to fully understand and determine the behaviors associated with their nonlinear dynamic mechanical properties. Along this line, several experimental techniques are applied in this paper to further develop a comprehensive understanding of the mechanical behavior of these pads under compressive loading. It is important to note that the samples used in this testing are not standard VACNTs, but have been grown separately from the final substrate on which they are mounted during testing. After growth, the samples are turned upside-down and fixed so that the bottom ends of all VACNTs are planar and present an ultra-flat top surface for contact during manipulation. The tests performed in this research include a low energy impact test and position controlled load-displacement testing with both constant and sinusoidal velocity loading and unloading. Through these testing procedures, the dependencies of the VACNT material properties to compression depth and displacement rate are observed and an attempt is made to incorporate them into a continuous model. For this, the results from the low energy impact testing provide grounds to state the nature of the nonlinear behavior in our VACNTs. By interrogating the available data from each testing technique, a combination of information provided by the theoretical energy balance and the identified coefficients from the Levenberg-Marquardt curve-fitting algorithm is then applied to generate a parametrized phenomenological model of the VACNT pad behavior. The proposed identified model is continuous and reasonably accounts for the overall material behavior as seen in the experimental data. The validity of this model is shown by means of normalized vector correlation of over 99% between the results of the numerical simulations and the existing experimental data. The material behaviors observed in this research qualitatively support those of several earlier investigators who have previously recognized the complex dissipative behavior of VACNTs.The proposed work itself paves the road for developing a useful engineering model of VACNT pad dynamics which will enable their introduction to mechanical applications in industry.
机译:垂直排列的碳纳米管(VACNT)垫最近已被广泛用作涉及处理裸硅晶片的材料处理过程中的接触面。这些过程将受益于这些垫提供的强大的摩擦力相互作用和最小的粘附力,从而可以拾取,搬运和快速放置晶片,而不会遇到由于过度的粘附力而引起的问题。尽管有这些好处,但由于VACNT具有非线性机械特性(目前仍未充分了解),因此实际实施受到了阻碍。因此,人们投入了大量精力来充分理解和确定与其非线性动态力学性能相关的行为。沿着这条线,本文采用了几种实验技术来进一步发展对这些垫在压缩载荷下的机械性能的全面了解。重要的是要注意,此测试中使用的样品不是标准的VACNT,而是与测试过程中所安装的最终基板分开生长的。生长后,将样品上下颠倒并固定,以使所有VACNT的底端都平整,并具有超平的顶表面,以便在操作过程中进行接触。这项研究中进行的测试包括低能量冲击测试和位置控制的负载-位移测试,以及恒定和正弦速度的加载和卸载。通过这些测试程序,可以观察到VACNT材料特性与压缩深度和位移速率之间的相关性,并尝试将其合并到连续模型中。为此,低能量冲击测试的结果为阐明VACNT中非线性行为的性质奠定了基础。通过询问每种测试技术的可用数据,然后将理论能量平衡提供的信息与Levenberg-Marquardt曲线拟合算法确定的系数进行组合,以生成VACNT垫行为的参数化现象模型。提议的已识别模型是连续的,并且合理地说明了实验数据中看到的总体材料行为。该模型的有效性通过数值模拟结果与现有实验数据之间超过99%的归一化向量相关性来表明。这项研究中观察到的物质行为从质量上支持了几位先前已经认识到VACNTs的复杂耗散行为的早期研究者的行为。拟议​​的工作本身为开发有用的VACNT垫动力学的工程模型铺平了道路,这将使它们能够引入机械应用在工业中。

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