Ultra-sensitive transparent and stretchable pressure sensor with single electrode

摘要

This paper reports a novel ultra-sensitive pressure sensor with single electrode PDMS-PEDOT-Parylene 3-layers structure, which is not only super thin, but also transparent and stretchable. Therefore, it can be utilized as an important part for electronic skins or wearable devices. Thanks to the sensitive deformation of the microstructures when external pressure applied, it reaches the high sensitivity of 14.15 kPa-1 and excellent linearity in the low pressure region, and distinguishes a pressure about 0.212 Pa for the first time. Moreover, the distinctive single electrode design greatly simplifies the fabrication process and enhances the transparency of the device.