Affect of magnetic field variation in ECR plasma discharge unit on polymer treatments

摘要

Technology of argon plasma sputtering is presented, and a coil current (magnetic flux) variation effects on silicone based polymer surface has been tried to figure out. Silicone pieces were interacted with Ar plasma discharge under two different coil current values of 150A and 100A which produce fluxes of 87.5mTesla and 50mTesla at the centre of ECR discharge unit, respectively. The purpose of this research effort is to characterize and understand how coil current changes the surface capability of discharge unit while causing a change in ion-to-neutral ratio which is one the fundamental control parameters for processing efficiency. A requirement of the substrate not suffer any damage is also achieved. Polymer samples were exposed to discharge separately for different flux rate, and the results were monitored with SEM. Samples were kept through the treatment by 5 minutes after plasma initialization.