Active disturbance rejection control for nanopositioning systems with piezoelectric actuators

摘要

Nanopositioning proposes a high demand for its control system. However, hysteresis, a common nonlinear phenomenon existing in piezoelectric actuator, decreases precision of nanopositioning. In this paper, active disturbance rejection control (ADRC) is designed to estimate and cancel the influence of hysteresis, and integral time absolute error (ITAE) optimal index is chosen to determine the parameters of ADRC. Simulations are performed on the basis of mathematic model of nanopositioning system, and numerical results show that ADRC is effective in the control of nanopositioning.