BiCMOS silicon photonics platform for fabrication of high-bandwidth electronic-photonic integrated circuits

摘要

Photonic BiCMOS is a novel technology for fabricating electronic-photonic integrated circuits. Broadband silicon photonics devices such as germanium photodiodes and depletion type Mach-Zehnder modulators were monolithically integrated in a high performance SiGe BiCMOS baseline process. Integration aspects and examples of demonstrator circuits shall be reviewed.