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Solving surface parameters of conic asphere mirror based on computer simulation

机译:基于计算机仿真的圆锥非球面镜表面参数求解

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摘要

Radius of curvature R and conic constant k are important parameters of aspheres. Null testing or CGH are usually used to evaluate the processing quality of aspheric mirrors in fabricating process . When the null compensator emerges a problem, additional method to ensure the accuracy of paraxial radius of curvature and conic constant is required. Based on the equation of conic aspheric, the computing model from which the paraxial radius of curvature R and conic constant k can be obtained was established, and a set of solving algorithm using singular value decomposition (SVD) method was derived. The simulating result of a 1800mm aspheric mirror is presented and the solving precision reaches R=6120±0.026mm, k=-1.0194±0.0008, thus the supplement to null testing of aspheric mirror is achieved effectively.
机译:曲率半径R和圆锥常数k是非球面的重要参数。通常使用零测试或CGH来评估非球面反射镜在制造过程中的加工质量。当零位补偿器出现问题时,需要使用其他方法来确保近轴曲率半径和圆锥常数的精度。基于圆锥非球面方程,建立了可得到近轴曲率半径R和圆锥常数k的计算模型,并推导了一组使用奇异值分解(SVD)方法的求解算法。给出了一个1800mm非球面镜的仿真结果,求解精度达到R = 6120±0.026mm,k = -1.0194±0.0008,有效地补充了非球面镜的零值测试。

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