A force rebalance and quadrature offset control method for the sense mode of MEMS gyroscopes

摘要

This paper describes a force rebalance and quadrature offset control method for the sense mode of silicon-on-glass z axis gyroscope operating at atmospheric pressure. Quadrature offset is an important strategy to correct the structural imperfection. The force rebalances method for the sense mode of MEMS gyroscope is used to improve the quality of sense axis. A double decoupled MEMS tuning fork gyroscope is used to carry out the experiment. The measured scale factor was 6.9 mV/°/s in a range of ±360 °/s with a nonlinearity of 0.09%. Zero bias stability of 0.7 °/h for long term measurements.