CO gas response of ZnO nanostructures using microcantilever in dynamic mode operation

摘要

We present a carbon monoxide (CO) gas response of nanostructured ZnO sensitive layer formed on a microcantilever. The ZnO nanostructures (nanorods) were prepared by a crystal growth method, and coated on microcantilever surface. The response of gas is indicated by increasing resonance frequency of microcantilever vibration in dynamic mode operation, where the gas molecules are detected in picogram level. The experimental result shows the consistent sensing behavior, indicating good sensing performance with good repeatablility and reproducibility.